SCEN103 -- Lithography

[logo] SCEN103 -- Lithography

Stages of Diffusion Doping

Reference: D. A. Fraser, The Physics of Semiconductor Devices (Clarendon Press, Oxford, 1983), pg 151.

Additional references regarding lithography:


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Last updated May 21, 2001.
Copyright George Watson, Univ. of Delaware, 1996.