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S. Ismat Shah

Title: Office: Phone: email: Web:

Professor 201 Dupont Hall (302) 831-1618 ismat@udel.edu www.physics.udel.edu/~ismat

Fields of Research

Nanostructures, Thin Film, Surface, Interfaces

Nanostructured Materials Synthesis, Characterization, and Applications

Inert Gas Condensation
Nanoparticles by Sol-Gel
Co-condensation of Nanoparticles
Metallorganic Chemical Vapor Deposition of Oxides
Energetic Condensation for the Deposition of Polycrystalline Silicon Films on Low Temperature substrates
Development of Sputtering Sources for Unique Applications
Nanostructures for the Environment, Magnetic, Optical and Electronic Applications

We are working on a variety of materials including electronic materials (SiC, Si 3N 4, GaN, Diamond, etc.), high temperature ceramics (Zr 2O3, TiO 2, etc.), diffusion barriers (Si 3N 4, DLC, TiN), Display materials (cathodes and phosphors), etc.

Thin film deposition processes:
(i) Evaporation
(ii) Sputtering (Diode, magnetron, etc.)
(iii) CVD (LPCVD, PACVD, etc.)
(iv) MBE (soon to come)

Thin Film Characterization Methods:
(i) XRD
(ii) TEM
(iii) XPS

Other ongoing projects:
Electron Filed Emission
Hard and Protective Coatings
Organic-Inorganic Interfaces
Dielectric Materials